GFAB - Graphene Foundry Services
Graphenea offers Graphene Foundry Services on custom wafers up to 6'' with customized design. This enable fast device prototyping and accelerates the development towards your application.
Processing Specifications
- · Batch Size: 1-3 wafers
- · Mask: according to design rules, and can be printed by customer or Graphenea
- · Graphene growth and transfer on 4’’ and 6’’ wafers
- · Metallization: Cr/Au,Cr/AuPd
- · Encapsulation: Al2O3 or Al2O3 +Si3N4
- · Minimum feature size: 5 μm
- · Dicing upon request
Quality control
All our samples are subjected to a rigorous QC in order to ensure a high quality products.- · Raman Spectroscopy inspection
- · Optical Microscopy inspection
- · Electrical conductivity on test structures
Publications
Graphene field effect transistors on flexible substrate: Stable process and high RF performance; DOI: 10.1109/EuMIC.2016.7777516 High-Gain Graphene Transistors with a Thin AlOx Top-Gate Oxide, Scientific Reports volume 7, Article number: 2419(2017) doi:10.1038/s41598-017-02541-2Downloads
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Guidelines and Design Rules
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Design Template
download gds file
Guidelines and Design Rules 
Design Template
