GRAPHENEA FOUNDRY

MultiProjectWafer Runs

Graphenea now offers MultiProjectWafer (MPW) runs. Through its mask-sharing scheme, custom devices in small batches are now available at affordable costs. Sharing the cost of fabrication allows to lower the entry barrier for researchers and companies interested in developing graphene-based technologies. We offer a reduced turnaround time compared to conventional MPW runs of just 3 months

Reduced waiting time with runs in February, May, August and November.

Ideal for batch prototyping and proof-of-concept validation


Min. cm2 per run: 4

PF1 from 1200 €

PF2 from 1800 €

PF3 from 3000 €

MULTIPROJECTWAFER PROCESS
  1. Your design…
    Graphenea EU
  2. …is assembled together within other designs that share the same process flow…
    Graphenea EU
  3. …and then are manufactured across the wafer
    Graphenea EU

MULTIPROJECTWAFER CALENDAR

Open to requests

No requests / MPW Closed

JAN FEB MAR APR MAY JUN JUL AUG SEP OCT NOV DEC

PROCESS FLOW 1

General Sensing

PROCESS FLOW 2

Bio Sensors

PROCESS FLOW 3

HKMG

PROCESS FLOW 1

General Purpose:

· Au (50 nm) contacts
· Graphene patterning

PROCESS FLOW 2

Liquids & Bio:

· Au (50 nm) contacts
· Graphene patterning
· Polymeric encapsulation (200 nm)
· Via opening

PROCESS FLOW 3

HKMG:

· High-K Metal Gate
· Gold (50 nm) contacts
· Graphene patterning
· Back gate (down to EOT = 10 nm)