GRAPHENEA FOUNDRY
GFAB
Suited for application development, pilot production and commercialisation, our GFAB services takes advantage of all the process flows within our Foundry, allowing the manufacture of many device architectures and enabling a myriad of technologies to become a reality. Fully customise the design to tailor the device size to your needs, choose the right material configuration & geometry for your application and define your die footprint: we will get it done.
- Minimum batch size: 40cm2
Starting from 165€ per 1x1cm2 - Design rules available under request
STORE
GFAB - Custom Designs
Graphenea offers graphene foundry services for die customization: geometry, architecture and footprint.
PROCESS FLOW 1
General purpose:
· Au (50 nm) contacts
· Optional: Ti, Ni, Cr and Al
· Graphene patterning
PROCESS FLOW 2
Liquids & Bio:
· Au (50 nm) contacts
· Graphene patterning
· Optional: Ti, Ni, Cr and Al
· Optional: Al2O3 encapsulation (50 nm)
· Optional: polymeric encapsulation (200 nm)
· Optional: Via opening
PROCESS FLOW 3 - HKMG
· High-K Metal Gate
· Gold (50 nm) contacts
· Graphene patterning
· Optional: Back gate (down to EOT = 5 nm)
· Optional: Top gate (down to EOT = 20 nm)